Concepedia

A. N. Golubenko

AN

Statistics

Publications

12

Citations

289

H-Index

12

Active since

1981

Affiliations

Nikolaev Institute of Inorganic Chemistry(Current)

Novosibirsk State University

Russian Academy of Sciences

Siberian Branch of the Russian Academy of Sciences

Institute of Semiconductor Physics

A. N. Golubenko is an author at Nikolaev Institute of Inorganic Chemistry specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

1981–2014

12

Publications

12

Synthesis of nanocrystalline silicon carbonitride films by remote plasma enhanced chemical vapor deposition using the mixture of hexamethyldisilazane with helium and ammonia

Yu. M. Rumyantsev, A. N. Golubenko, M. L. Kosinova et al. · Journal of Crystal Growth · 2002 · 40 citations

, , +8

Phase composition of thin oxide films on InSb

T. P. Smirnova, A. N. Golubenko, N.F. Zacharchuk et al. · Thin Solid Films · 1981 · 36 citations

, , +5

Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions

A. N. Golubenko, Yu. M. Rumyantsev, E. A. Maximovskii · Glass Physics and Chemistry · 2009 · 33 citations

Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane

M. L. Kosinova, Yu. M. Rumyantsev, A. N. Golubenko et al. · Inorganic Materials · 2003 · 26 citations

On thermodynamic equilibria of solid BN and gas phases in the B−N−H−Cl−He system

A. N. Golubenko, M. L. Kosinova, Aleksei A. Titov et al. · Thin Solid Films · 1997 · 26 citations

, , +9

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