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Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane

DOI

26

Citations

29

References

2003

Year

M. L. Kosinova, Yu. M. Rumyantsev, A. N. Golubenko, B. M. Ayupov, I. P. Dolgovesova, Boris A. Kolesov, F. A. Kuznetsov
Inorganic Materials

References

YearCitations

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