Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane

M. L. Kosinova, Yu. M. Rumyantsev, A. N. Golubenko, B. M. Ayupov, I. P. Dolgovesova, Boris A. Kolesov, F. A. Kuznetsov

Inorganic Materials · 2003 · 27 citations · 30 references

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