Statistics
Publications
2
Citations
92
H-Index
2
Active since
2010
Affiliations
Erwine Pargon is an author at Centre National de la Recherche Scientifique specializing in etching processes, materials science, and thin oxide layers.
Publications per year
2010–2010
2
2
Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing
Camille Petit-Étienne, Maxime Darnon, Laurent Vallier et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 74 citations · Full text
Synchronous Pulsed Plasma for Silicon Etch Applications
Maxime Darnon, Camille Petit-Étienne, Erwine Pargon et al. · ECS Transactions · 2010 · 18 citations
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