Ming‐Shih Tsai

Statistics

Publications

Citations

101

H-Index

Active since

1997

Affiliations

National Yang Ming Chiao Tung University(Current)

Ming‐Shih Tsai is an author at National Yang Ming Chiao Tung University specializing in chemical engineering, applied physics, and surface engineering.

Top concepts

Chemical EngineeringThin FilmsEngineeringApplied PhysicsSurface ScienceWater TreatmentMaterial ScienceSurface EngineeringMaterial Characterization

Publications per year

1997–2004

Publications

Post-Cu CMP cleaning for colloidal silica abrasive removal

Po‐Lin Chen, Jyh‐Herng Chen, Ming‐Shih Tsai et al. · Microelectronic Engineering · 2004 · 76 citations

Extractive Metallurgy, Chemical Engineering, Chemisorption +3

Chemical‐Mechanical Polishing and Material Characteristics of Plasma‐Enhanced Chemically Vapor Deposited Fluorinated Oxide Thin Films

Wei‐Tsu Tseng, Yuan‐Tsu Hsieh, Chi‐Fa Lin et al. · Journal of The Electrochemical Society · 1997 · 25 citations

Materials Science, Chemical Engineering, Material Characteristics +14

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