Concepedia

Chi‐Fa Lin

CL

Statistics

Publications

3

Citations

95

H-Index

3

Active since

1997

Affiliations

National Yang Ming Chiao Tung University(Current)

National Cheng Kung University

Chi‐Fa Lin is an author at National Yang Ming Chiao Tung University specializing in engineering, materials science, and chemical engineering.

Top concepts

Publications per year

1997–2000

3

Publications

3

Formation and characteristics of silicon nanocrystals in plasma-enhanced chemical-vapor-deposited silicon-rich oxide

Chi‐Fa Lin, Wei‐Tsu Tseng, Ming Feng · Journal of Applied Physics · 2000 · 55 citations

, , +17

Chemical‐Mechanical Polishing and Material Characteristics of Plasma‐Enhanced Chemically Vapor Deposited Fluorinated Oxide Thin Films

Wei‐Tsu Tseng, Yuan‐Tsu Hsieh, Chi‐Fa Lin et al. · Journal of The Electrochemical Society · 1997 · 25 citations

, , +14

Process Optimization and Integration for Silicon Oxide Intermetal Dielectric Planarized by Chemical Mechanical Polish

Chi‐Fa Lin, Wei‐Tsu Tseng, Ming‐Shiann Feng · Journal of The Electrochemical Society · 1999 · 15 citations

, , +21

1–3 of 3