Concepedia

Edward D. Babich

ED

2

Publications

35

Citations

2

H-Index

1989

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

Edward D. Babich is an author at IBM Research - Thomas J. Watson Research Center specializing in surface science, materials science, and engineering.

Top concepts

EngineeringSurface ScienceMaterial ScienceChemistryThin FilmsPhotochemistryApplied PhysicsChemical KineticsOptical MaterialsLaser Applications

Publications per year

1989–1993

2

Publications

2

A simplified silylation process

Jane M. Shaw, M. Hatzakis, Edward D. Babich et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 25 citations

Materials Science, Engineering, Electronic Materials +15

Optical properties of hydrogenated amorphous-carbon film for attenuated phase-shift mask applications

Alessandro Callegari, Andrew Pomerene, H.J. Hovel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 10 citations

Materials Science, Short Wavelength Optic, Optical Materials +15

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