Huimeng Wu

Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing

Huimeng Wu, Lewis Stern, Deying Xia et al. · Journal of Materials Science Materials in Electronics · 2013 · 67 citations

Electrical Engineering, Ion Implantation, Engineering +8

Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair

C. Gonzalez, Rajendra Timilsina, Guoliang Li et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 36 citations · Full text

Materials Science, Ion Implantation, Engineering +15

Synthesis of nanowires via helium and neon focused ion beam induced deposition with the gas field ion microscope

Huimeng Wu, Lewis Stern, Jihua Chen et al. · Nanotechnology · 2013 · 34 citations

Precise nanofabrication with multiple ion beams for advanced circuit edit

Huimeng Wu, David C. Ferranti, Lewis Stern · Microelectronics Reliability · 2014 · 15 citations

Ion Implantation, Engineering, Electron-beam Lithography +11

High‐Density Data Recording in an Optoelectrical Dual‐Responsive Thin Film

Guiyuan Jiang, Yanlin Song, Yongqiang Wen et al. · ChemPhysChem · 2005 · 13 citations

Optical Materials, Engineering, Organic Electronics +21