Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing

Gas-assisted focused electron beam and ion beam processing and fabrication

Ivo Utke, P. Hoffmann, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 1K citations · Full text

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A critical literature review of focused electron beam induced deposition

Willem F. van Dorp · Journal of Applied Physics · 2008 · 506 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Helium ion microscope: A new tool for nanoscale microscopy and metrology

Bill Ward, John Notte, N. P. Economou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 418 citations

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Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

Steven Randolph, Jason D. Fowlkes, Philip D. Rack · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 2006 · 414 citations

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Electron-beam fabrication of 80-Å metal structures

A. N. Broers, W. W. Molzen, J. J. Cuomo et al. · Applied Physics Letters · 1976 · 306 citations

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