Concepedia

Publication | Closed Access

Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing

DOI

67

Citations

43

References

2013

Year

Huimeng Wu, Lewis Stern, Deying Xia, David C. Ferranti, Bill Thompson, Kate L. Klein, C. Gonzalez, Philip D. Rack
Journal of Materials Science Materials in Electronics

References

YearCitations

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