Bill Thompson

Understanding imaging modes in the helium ion microscope

Larry Scipioni, Colin A. Sanford, John Notte et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 68 citations

Natural Sciences, Materials Science, Physics +15

Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing

Huimeng Wu, Lewis Stern, Deying Xia et al. · Journal of Materials Science Materials in Electronics · 2013 · 68 citations

Natural Sciences, Materials Science, Physics +8

Elemental analysis with the helium ion microscope

Sybren Sijbrandij, Bill Thompson, John Notte et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 33 citations

Natural Sciences, Chemistry, Physics +12

Creating nanohole arrays with the helium ion microscope

M.V. Ananth, Lewis Stern, David C. Ferranti et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +11