Sui Zhang

Rapid thermal processing with microwave heating

Sui Zhang, R. Buchta, D. Sigurd · Thin Solid Films · 1994 · 28 citations

Engineering, Microwave Heating, Radiofrequency Heating +5

Robust, scalable self-aligned platinum silicide process

Z. Zhang, Sui Zhang, Mikael Östling et al. · Applied Physics Letters · 2006 · 24 citations

Engineering, Silicon On Insulator, Chemical Engineering +16

Electrical evaluation of high-temperature effects on gate oxide integrity in a self-aligned CoSi2 MOS process

Tord Karlin, Sui Zhang, Karl-Henrik Ryden et al. · Applied Surface Science · 1993 · 15 citations

Materials Science, Materials Engineering, Electrical Engineering +11

Temperature control during chemical vapor deposition of polycrystalline silicon with substrate heating by microwaves

R. Buchta, Sui Zhang, D. Sigurd et al. · Applied Physics Letters · 1993 · 14 citations

Engineering, Substrate Heating, Chemical Deposition +18

An experimental study of the influence of oxygen on silicide formation with tungsten deposited from tungsten hexafluoride

Sui Zhang, U. Smith, R. Buchta et al. · Journal of Applied Physics · 1991 · 13 citations

Engineering, Oxidation Resistance, Tungsten Films +19