Concepedia

Tord Karlin

TK

6

Publications

83

Citations

6

H-Index

1993

Active since

Affiliations

Clinical Laserthermia Systems (Sweden)(Current)

Fraunhofer Institute for Photonic Microsystems

Tord Karlin is an author at Clinical Laserthermia Systems (Sweden) specializing in engineering, photonics, and microfabrication.

Top concepts

Publications per year

1993–2014

6

Publications

6

Application of spatial light modulators for microlithography

Ulrike Dauderstaedt, Peter Duerr, Tord Karlin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 16 citations

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Electrical evaluation of high-temperature effects on gate oxide integrity in a self-aligned CoSi2 MOS process

Tord Karlin, Sui Zhang, Karl-Henrik Ryden et al. · Applied Surface Science · 1993 · 15 citations

, , +11

A high-end mask writer using a spatial light modulator

U. Ljungblad, P. Askebjer, Tord Karlin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 15 citations

, , +13

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

J. Schmidt, Ulrike Dauderstaedt, Peter Duerr et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 14 citations

Mechanical stability of spatial light modulators in microlithography

Ulrike Dauderstädt, Peter Duerr, U. Ljungblad et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 12 citations

, , +14

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