Eric Busch

Cleaning of patterned porous low-k dielectrics with water, carbon dioxide and ambidextrous surfactants

John A. Keagy, Keith P. Johnston, Eric Busch et al. · The Journal of Supercritical Fluids · 2006 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +16

Study of plasma-induced damage of porous ultralow-k dielectric films during photoresist stripping

Songlin Xu, Qin Ce, Diao Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +14

CO2 promotes penetration and removal of aqueous hydrocarbon surfactant cleaning solutions and silylation in low-k dielectrics with 3 nm pores

John A. Keagy, Yuan Li, Peter F. Green et al. · The Journal of Supercritical Fluids · 2007 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +13

Time of flight secondary ion mass spectroscopy investigation of ultralow-k dielectric modifications in hydrogen and deuterium plasmas

P. Lazzeri, Guido J. Stueber, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 18 citations

Natural Sciences, Materials Science, Physics +14

On the photoresist stripping and damage of ultralow k dielectric materials using remote H2- and D2-based discharges

Guido J. Stueber, G. S. Oehrlein, P. Lazzeri et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +14