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Cleaning of patterned porous low-k dielectrics with water, carbon dioxide and ambidextrous surfactants

Materials ScienceCarbon DioxideChemical EngineeringSelf-cleaning SurfaceEngineeringNanoporous MaterialMicrofabricationSurface SciencePorous MembraneWater PurificationAmbidextrous SurfactantsPorous Low-k DielectricsPorous SensorElectrical InsulationSurfactant Solution