Concepedia

John A. Keagy

JA

2

Publications

56

Citations

2

H-Index

2006

Active since

Affiliations

The University of Texas at Austin(Current)

John A. Keagy is an author at The University of Texas at Austin specializing in electrical insulation, water purification, and engineering.

Top concepts

Publications per year

2006–2007

2

Publications

2

Cleaning of patterned porous low-k dielectrics with water, carbon dioxide and ambidextrous surfactants

John A. Keagy, Xiaogang Zhang, Keith P. Johnston et al. · The Journal of Supercritical Fluids · 2006 · 39 citations

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CO2 promotes penetration and removal of aqueous hydrocarbon surfactant cleaning solutions and silylation in low-k dielectrics with 3 nm pores

John A. Keagy, Yuan Li, Peter F. Green et al. · The Journal of Supercritical Fluids · 2007 · 17 citations

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