Songlin Xu

Characteristics and mechanism of etch process sensitivity to chamber surface condition

Songlin Xu, Zhiwen Sun, Xueyu Qian et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 66 citations

Engineering, Br Densities, Plasma Processing +17

Production of Halomethylenes in Free-Jet Expansions from a Hot Nozzle: Identification and Characterization of HCBr and DCBr by Laser-Induced Fluorescence Excitation Spectroscopy

Songlin Xu, Kyle A. Beran, Marlin D. Harmony · The Journal of Physical Chemistry · 1994 · 45 citations

Spectroscopic Property, Chemical Engineering, Molecular Sciences +14

LIF excitation spectrum of dibromocarbene in a supersonic free-jet expansion

Songlin Xu, Marlin D. Harmony · The Journal of Physical Chemistry · 1993 · 28 citations

Aeroacoustics, Engineering, Altmetric Attention Score +17

Fluorocarbon polymer formation, characterization, and reduction in polycrystalline–silicon etching with CF4-added plasma

Songlin Xu, Zhiwen Sun, Arthur Chen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 28 citations

Engineering, Oxide Deposition, Polymer Nanocomposites +18

Study of plasma-induced damage of porous ultralow-k dielectric films during photoresist stripping

Songlin Xu, Qin Ce, Diao Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 26 citations

Engineering, Vacuum Device, Plasma Processing +18