Songlin Xu - Concepedia

Author

Songlin Xu

Applied Materials (United States)

Also Known As

Songlin Xu, Songlin Xu Songlin Xu

Publications

327

Citations

H-Index

Concepts

All Affiliations

Applied Materials (United States)University of Kansas Centre National de la Recherche Scientifique Commissariat à l'Énergie Atomique et aux Énergies Alternatives CEA Grenoble

About

Songlin Xu is an author at Applied Materials (United States) specializing in engineering, applied physics, and chemical engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	12	304
2	Applied Physics	9	9	236
3	Chemical Engineering	9	9	251
4	Natural Sciences	5	5	120
5	Biostatistics	1	1	28

Songlin Xu

Publications

318

Citations

H-Index

Page 1

	Year	Citations
Characteristics and mechanism of etch process sensitivity to chamber surface condition Songlin Xu, Zhiwen Sun, Xueyu Qian, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringBr DensitiesPlasma ProcessingChamber SurfaceHigh Density	2001	66
Production of Halomethylenes in Free-Jet Expansions from a Hot Nozzle: Identification and Characterization of HCBr and DCBr by Laser-Induced Fluorescence Excitation Spectroscopy Songlin Xu, Kyle A. Beran, Marlin D. Harmony The Journal of Physical Chemistry Spectroscopic PropertyChemical EngineeringMolecular SciencesEngineeringHot Nozzle	1994	45
LIF excitation spectrum of dibromocarbene in a supersonic free-jet expansion Songlin Xu, Marlin D. Harmony The Journal of Physical Chemistry AeroacousticsEngineeringAltmetric Attention ScoreMarlin D. HarmonyciteBibliometrics	1993	28
Fluorocarbon polymer formation, characterization, and reduction in polycrystalline–silicon etching with CF4-added plasma Songlin Xu, Zhiwen Sun, Arthur Chen, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringOxide DepositionPolymer NanocompositesPlasma ProcessingPolymers	2001	28
Study of plasma-induced damage of porous ultralow-k dielectric films during photoresist stripping Songlin Xu, Qin Ce, Diao Li, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringVacuum DevicePlasma ProcessingChemical EngineeringOptical Properties	2007	26
Study of tungsten oxidation in O2∕H2∕N2 downstream plasma Songlin Xu, Diao Li Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Oxygen Reduction ReactionChemical EngineeringEngineeringCorrosionStable Wo3	2008	21
Mass spectrometry studies of resist trimming processes in HBr∕O2 and Cl2∕O2 chemistries Erwine Pargon, O. Joubert, T. Chevolleau, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Plasma Gas PhaseEngineeringVacuum DeviceChemistryCl2∕o2 Chemistries	2005	21
Effect of surface polymerization on plasma and process stability in polycrystalline-silicon etching Songlin Xu, Thorsten Lill, Shashank Deshmukh, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringPolycrystalline-silicon EtchingPlasma ProcessingChemical EngineeringNonthermal Plasma	2002	17
Wall-dependent etching characteristics of organic antireflection coating in O2+halogen/hydrogen halide plasma Songlin Xu, Thorsten Lill, D. V. Podlesnik Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Process ShiftEngineeringO Radical DensityOrganic Antireflection CoatingPlasma Processing	2001	15
Characterization of resist-trimming processes by quasi <i>in situ</i> x-ray photoelectron spectroscopy E. Pargon, O. Joubert, Songlin Xu, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceX-ray SpectroscopyEngineeringSpecific ResistanceX-ray Diffraction	2004	14

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