Concepedia

B. Cord

BC

15

Publications

892

Citations

12

H-Index

1978

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Nano Hydrophobics (United States)

Nano-C (United States)

Agency for Science, Technology and Research

National Institute of Standards and Technology

B. Cord is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1978–2010

15

Publications

15

Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography

Joel K. W. Yang, B. Cord, Huigao Duan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 180 citations · Full text

, , +15

Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist

Huigao Duan, Joel K. W. Yang, B. Cord et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 115 citations · Full text

, , +21

Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist

Donny Winston, B. Cord, Bin Ming et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 105 citations · Full text

, , +16

Optimal temperature for development of poly(methylmethacrylate)

B. Cord, Jodie L. Lutkenhaus, Karl K. Berggren · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 93 citations

, , +20

Anisotropic Structure and Transport in Self-Assembled Layered Polymer−Clay Nanocomposites

Jodie L. Lutkenhaus, Elsa Olivetti, Eric Verploegen et al. · Langmuir · 2007 · 72 citations

, , +19

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