Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator

Thilo Sandner, A. Kenda, Christian Drabe, +2

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Sensor TechnologyPhotonicsElectronic InstrumentationEngineeringMicrofabrication +12

Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers

Thilo Sandner, Eric Gaumont, Harald Schenk, +1

Journal of Micro/Nanolithography MEMS and MOEMS

EngineeringMeasurementOptomechanical SystemEducationIntegrated Circuits +21

Application of a micromachined translatory actuator to an optical FTIR spectrometer

A. Kenda, Christian Drabe, Harald Schenk, +3

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Optical MaterialsEngineeringOptomechanical SystemBiomedical EngineeringIntegrated Circuits +25

Position encoding and phase control of resonant MOEMS mirrors

Andreas Tortschanoff, M. Lenzhofer, A. Frank, +5

Sensors and Actuators A Physical

PhotonicsEngineeringOptic DesignResonant Moems MirrorsMechanical Systems +3

Single-detector micro-electro-mechanical scanning grating spectrometer

Martin Kraft, A. Kenda, A. Frank, +5

Analytical and Bioanalytical Chemistry

Materials ScienceEngineeringAnalytical InstrumentationMicrofabricationAnalytical Microsystems +3

MEMS-based compact FT-spectrometers - a platform for spectroscopic mid-infrared sensors

Martin Kraft, A. Kenda, Thilo Sandner, +1

EngineeringBiomedical EngineeringChemistryOptical PropertiesMems-based Spectrometers +15

Improved MOEMS-based ultra-rapid Fourier transform infrared spectrometer

Andreas Tortschanoff, A. Kenda, Martin Kraft, +3

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Novel Moems ActuatorEngineeringInfrared SensorInfrared SpectroscopySpectroscopy +8

A compact spectrometer based on a micromachined torsional mirror device

A. Kenda, W. Scherf, Robert G. Hauser, +2

EngineeringMeasurementMicroscopyInstrumentation EngineeringMicro-optical Component +17

Raman spectroscopy of graphene on AlGaN/GaN heterostructures

S. Dusari, Nitin Goyal, M. DeBiasio, +1

Thin Solid Films

Materials ScienceEngineeringAluminum Gallium NitrideApplied PhysicsGraphene +1

Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

A. Kenda, Martin Kraft, Andreas Tortschanoff, +5

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Photonic SensorShort Wavelength OpticEngineeringFiber OpticsIn-plane Capacitive Drives +25