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Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
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2014
Year
EngineeringMeasurementOptomechanical SystemEducationIntegrated CircuitsOptomechanicsMicro-optical ComponentHigh-power LasersSystem IntegrationMicro-electromechanical SystemCalibrationOptical DiagnosticsInstrumentationOptical SystemsTranslatory Moems ActuatorElectrical EngineeringMoems ActuatorMicroelectronicsOptical SensorsFourier TransformInstrument ScienceTransducer PrincipleApplied PhysicsElectronic InstrumentationOptoelectronicsFourier Transform Spectrometers
A translatory MOEMS actuator with extraordinary large stroke—especially developed for fast optical path length modulation in miniaturized Fourier transform infrared spectrometers (FTSs)—is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5-mm diameter. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible silicon-on-insulator process. Up to ±600 μm amplitude (typically 1 mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration, the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. The thermal influences of packaging technology on MOEMS behavior are discussed in more detail.