Concepedia

Publication | Closed Access

Position encoding and phase control of resonant MOEMS mirrors

DOI

32

Citations

12

References

2010

Year

Andreas Tortschanoff, M. Lenzhofer, A. Frank, Michael Wildenhain, T. Sandner, Harald Schenk, W. Scherf, A. Kenda
Sensors and Actuators A Physical

References

YearCitations

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