Concepedia
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Publications
2
Citations
65
H-Index
Active since
2006
Hee-Youl Lim is an author specializing in process window development, semiconductor devices, and electrical engineering.
Publications per year
2006–2013
Positive and negative tone double patterning lithography for 50nm flash memory
Chang-Moon Lim, Seo-Min Kim, Young-Sun Hwang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 54 citations
Engineering, Electrical Engineering, Materials Science +11
Patterning challenges of EUV lithography for 1X-nm node DRAM and beyond
Tae-Seung Eom, Hongik Kim, Choon-Ky Kang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Computer Engineering, Electrical Engineering +10
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