Concepedia
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Publications
1
Citations
11
H-Index
Active since
2013
Choon-Ky Kang is an author specializing in microfabrication, engineering, and applied physics.
Top concepts
EngineeringApplied PhysicsNanoelectronicsOptoelectronicsMicroelectronicsMicrofabricationElectronic PackagingComputer ArchitectureElectrical Engineering
Publications per year
2013–2013
Patterning challenges of EUV lithography for 1X-nm node DRAM and beyond
Tae-Seung Eom, Hongik Kim, Choon-Ky Kang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Electron-beam Lithography, Euv Lithography +19
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