Concepedia
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Publications
2
Citations
21
H-Index
Active since
2009
Tae-Seung Eom is an author specializing in electronic packaging, applied physics, and microfabrication.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMicrofabricationElectronic PackagingElectrical EngineeringMicroscopy3D PrintingNanoelectronicsOptoelectronics
Publications per year
2009–2013
Patterning challenges of EUV lithography for 1X-nm node DRAM and beyond
Tae-Seung Eom, Hongik Kim, Choon-Ky Kang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Electron-beam Lithography, Euv Lithography +19
Comparative study of DRAM cell patterning between ArF immersion and EUV lithography
Tae-Seung Eom, Sarohan Park, Jun-Taek Park et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 10 citations
Engineering, Electron-beam Lithography, Microscopy +18
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