Concepedia

K. Iltgen

KI

Statistics

Publications

2

Citations

127

H-Index

2

Active since

1997

Affiliations

University of Münster(Current)

K. Iltgen is an author at University of Münster specializing in microelectronics, applied physics, and engineering.

Top concepts

Publications per year

1997–1998

2

Publications

2

Optimized time-of-flight secondary ion mass spectroscopy depth profiling with a dual beam technique

K. Iltgen, C. Bendel, A. Benninghoven et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 111 citations

, , +18

Secondary ion mass spectrometry depth profiling of ultralow-energy ion implants: Problems and solutions

J. G. M. van Berkum, E. J. H. Collart, K. Weemers et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 16 citations · Full text

, , +16

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