E. J. H. Collart

Effect of amorphization and carbon co-doping on activation and diffusion of boron in silicon

B. J. Pawlak, T. Janssens, Bert Brijs et al. · Applied Physics Letters · 2006 · 64 citations

Engineering, Materials Engineering, Materials Science +17

On the role of atomic oxygen in the etching of organic polymers in a radio-frequency oxygen discharge

E. J. H. Collart, J. A. G. Baggerman, Robert J. Visser · Journal of Applied Physics · 1995 · 62 citations

Natural Sciences, Chemistry, Materials Science +14

Suppression of phosphorus diffusion by carbon co-implantation

B. J. Pawlak, Ray Duffy, T. Janssens et al. · Applied Physics Letters · 2006 · 57 citations

Engineering, Materials Engineering, Materials Science +17

Ion-induced etching of organic polymers in argon and oxygen radio-frequency plasmas

J. A. G. Baggerman, Robert J. Visser, E. J. H. Collart · Journal of Applied Physics · 1994 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +14

Excitation mechanisms of oxygen atoms in a low pressure O2 radio-frequency plasma

E. J. H. Collart, J. A. G. Baggerman, Robert J. Visser · Journal of Applied Physics · 1991 · 53 citations

Natural Sciences, Chemistry, Plasma Physics +15