Paul Tesch

High brightness inductively coupled plasma source for high current focused ion beam applications

Noel Smith, Walter P. Skoczylas, Sean M. Kellogg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 150 citations · Full text

Optical Materials, Engineering, Ion Beam Instrumentation +19

A high brightness source for nano-probe secondary ion mass spectrometry

Noel Smith, Paul Tesch, Noel Martin et al. · Applied Surface Science · 2008 · 30 citations

Accelerator Mass Spectrometry, Analytical Instrumentation, Microscopy +13

High Current Focused Ion Beam Instrument for Destructive Physical Analysis Applications

Paul Tesch, Noel Smith, Noel Martin et al. · Proceedings - International Symposium for Testing and Failure Analysis · 2008 · 11 citations

New Ion Probe for Next Generation FIB, SIMS, and Nano-Ion Implantation

Noel Smith, Paul Tesch, Noel Martin et al. · Microscopy Today · 2009 · 10 citations

Engineering, Microscopy, Ion Species +19