Statistics
Publications
2
Citations
166
H-Index
2
Active since
2006
Affiliations
Australian National University(Current)
Sean M. Kellogg is an author at Australian National University specializing in physics, instrumentation, and applied physics.
Publications per year
2006–2010
2
2
High brightness inductively coupled plasma source for high current focused ion beam applications
Noel Smith, Walter P. Skoczylas, Sean M. Kellogg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 150 citations · Full text
Optical Materials, Engineering, Ion Beam Instrumentation +19
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