Microscopy and Microanalysis · 2010 · 16 citations · 1 references
Natural SciencesChemistryAnalytical ChemistryElemental AnalysisSpectroscopyHigh-temperature PlasmasPlasma SourcesSample PreparationInductively Coupled Plasma AnalysisInductively Coupled Plasma Atomic Emission SpectroscopyInductively Coupled Plasma SourcesInductively Coupled Plasma SpectrometryIon SourcesMicroanalysis
Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
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High brightness inductively coupled plasma source for high current focused ion beam applications
Noel Smith, Walter P. Skoczylas, Sean M. Kellogg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 152 citations · Full text
Natural Sciences, Physics, Optics +11