Microscopy Today · 2009 · 10 citations · 0 references
EngineeringMicroscopyIon SpeciesIon Beam InstrumentationBiomedical EngineeringIon ProcessAbstract HyperiontmIon ImplantationIon Beam PhysicsIon BeamInstrumentationIon EmissionElectrical EngineeringNanotechnologyNano-ion ImplantationHigh-performance Ion SourceMicroelectronicsBiomedical DiagnosticsScanning Probe MicroscopyApplied PhysicsNew Ion ProbeNext Generation Fib
Abstract HyperionTM is a newly developed high-performance ion source that significantly advances the capabilities of many ion beam techniques used by material scientists and engineers. Hyperion has been developed to provide focused beams as small as 10 nm, beam currents up to several micro-Amps, and a broad range of ion species that include He+, O2 +, Xe+ and H3 +.