Nobutaka Ohya

Statistics

Publications

Citations

105

H-Index

Active since

1995

Affiliations

Kyushu University(Current)

Nobutaka Ohya is an author at Kyushu University specializing in materials science, plasma-assisted chemical vapor deposition, and plasma-enhanced chemical vapor deposition.

Publications per year

1995–2002

Publications

Determination of diamond [100] and [111] growth rate and formation of highly oriented diamond film by microwave plasma-assisted chemical vapor deposition

Hideaki Maeda, Kyo Ohtsubo, Miki Irie et al. · Journal of materials research/Pratt's guide to venture capital sources · 1995 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +9

Epitaxial nucleation of diamond on an iridium substrate by bias treatment, for microwave plasma-assisted chemical vapor deposition

Takeyasu Saito, Shigenori Tsuruga, Nobutaka Ohya et al. · Diamond and Related Materials · 1998 · 38 citations

Natural Sciences, Materials Science, Physics +16

A new deep reactive ion etching process by dual sidewall protection layer

Junji Ohara, Kazuhiko Kano, Yusuke Takeuchi et al. · 2002 · 15 citations

Engineering, Materials Science, Microfabrication +11

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