Statistics
Publications
5
Citations
73
H-Index
5
Active since
1984
Affiliations
Yusuke Takeuchi is an author at Nitto (Japan) specializing in semiconductor devices, engineering, and materials science.
Publications per year
1984–2002
5
5
A new deep reactive ion etching process by dual sidewall protection layer
Junji Ohara, Kazuhiko Kano, Yusuke Takeuchi et al. · 2002 · 15 citations
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