Concepedia

Author

R. Tsu

University of Illinois Urbana-Champaign

Also Known As

R. Tsu, Robert Tsu

23

Publications

688

Citations

13

H-Index

38

Concepts

All Affiliations

University of Illinois Urbana-ChampaignTexas Instruments (United States)Texas Instruments (Japan)
RT

About

R. Tsu is an author at University of Illinois Urbana-Champaign specializing in engineering, applied physics, and surface science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

12

13

651

2

Applied Physics

11

12

619

3

Natural Sciences

2

2

36

4

Chemical Engineering

2

2

146

5

Health Sciences

1

1

133

R. Tsu

×

14

Publications

672

Citations

13

H-Index

YearCitations

Thermal desorption of ultraviolet–ozone oxidized Ge(001) for substrate cleaning

X.-J. Zhang, G. Xue, Ankur Agarwal,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1993

133

Mechanisms and kinetics of Si atomic-layer epitaxy on Si(001)2×1 from Si2H6

D. Lubben, R. Tsu, T. R. Bramblett,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1991

120

Scanning-tunneling-microscopy studies of disilane adsorption and pyrolytic growth on Si(100)-(2x1)

Deng-Sung Lin, E. S. Hirschorn, T.‐C. Chiang,

Physical review. B, Condensed matter

1992

74

Leakage and breakdown reliability issues associated with low-k dielectrics in a dual-damascene Cu process

R. Tsu, J. W. McPherson, W.R. McKee

2002

74

Vacancy Association of Defects in Annealed GaAs

L. L. Chang, L. Esaki, R. Tsu

Applied Physics Letters

1971

54

Direct current conduction properties of sputtered Pt/(Ba0.7Sr0.3)TiO3/Pt thin films capacitors

Windsor Hsu, J. D. Luttmer, R. Tsu,

Applied Physics Letters

1995

54

Adsorption and dissociation of Si2H6 on Ge(001)2 × 1

R. Tsu, D. Lubben, T. R. Bramblett,

Surface Science

1993

32

Surface segregation and growth-mode transitions during the initial stages of Si growth on Ge(001)2×1 by cyclic gas-source molecular beam epitaxy from Si2H6

R. Tsu, H. Z. Xiao, Y.-W. Kim,

Journal of Applied Physics

1994

26

Mechanisms of excimer laser cleaning of air-exposed Si(100) surfaces studied by Auger electron spectroscopy, electron energy-loss spectroscopy, reflection high-energy electron diffraction, and secondary-ion mass spectrometry

R. Tsu, D. Lubben, T. R. Bramblett,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1991

23

Electronic structure of the Si(001)2 × 1:H surface and pathway for H2 desorption

Guangwei Li, Yia‐Chung Chang, R. Tsu,

Surface Science

1995

22

Page 1