Concepedia

R. Tsu

RT

14

Publications

672

Citations

13

H-Index

1971

Active since

Affiliations

University of Illinois Urbana-Champaign(Current)

Texas Instruments (United States)

Texas Instruments (Japan)

R. Tsu is an author at University of Illinois Urbana-Champaign specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceChemistryThin FilmsElectrical EngineeringSemiconductorsCrystalline DefectsMicroelectronics

Publications per year

1971–2002

14

Publications

14

Thermal desorption of ultraviolet–ozone oxidized Ge(001) for substrate cleaning

X.-J. Zhang, G. Xue, Ankur Agarwal et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 133 citations

Engineering, Vacuum Device, Chemistry +16

Mechanisms and kinetics of Si atomic-layer epitaxy on Si(001)2×1 from Si2H6

D. Lubben, R. Tsu, T. R. Bramblett et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 120 citations

Engineering, Sih3 Radicals, Ale Films +16

Scanning-tunneling-microscopy studies of disilane adsorption and pyrolytic growth on Si(100)-(2x1)

Deng-Sung Lin, E. S. Hirschorn, T.‐C. Chiang et al. · Physical review. B, Condensed matter · 1992 · 74 citations

Materials Science, Semiconductors, Molecular Sieve +15

Leakage and breakdown reliability issues associated with low-k dielectrics in a dual-damascene Cu process

R. Tsu, J. W. McPherson, W.R. McKee · 2002 · 74 citations

Engineering, Dual-damascene Cu Process, Defect Tolerance +16

Vacancy Association of Defects in Annealed GaAs

L. L. Chang, L. Esaki, R. Tsu · Applied Physics Letters · 1971 · 54 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +11

Rows per page

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