Concepedia
Statistics
Publications
2
Citations
234
H-Index
Active since
2004
Affiliations
Noble(Current)
R. Liu is an author at Noble specializing in applied physics, microelectronics, and materials engineering.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMaterials EngineeringThin FilmsNanoelectronicsCrystalline DefectsChemical Engineering
Publications per year
2004–2004
Impact of Deposition and Annealing Temperature on Material and Electrical Characteristics of ALD HfO[sub 2]
Dina H. Triyoso, R. Liu, D. Roan et al. · Journal of The Electrochemical Society · 2004 · 165 citations
Aluminium Nitride, Engineering, Thin Film Process Technology +18
Film properties of ALD HfO2 and La2O3 gate dielectrics grown on Si with various pre-deposition treatments
Dina H. Triyoso, R. I. Hegde, Jennifer E. Grant et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 69 citations
Engineering, Various Pre-deposition Treatments, Silicon On Insulator +16
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