Concepedia

Wolfgang Harnisch

WH

Statistics

Publications

3

Citations

62

H-Index

3

Active since

2006

Affiliations

Carl Zeiss (Germany)(Current)

Wolfgang Harnisch is an author at Carl Zeiss (Germany) specializing in radiation imaging, ophthalmology, and computer engineering.

Top concepts

Publications per year

2006–2011

3

Publications

3

AIMS EUV: the actinic aerial image review platform for EUV masks

Dirk Hellweg, Johannes Ruoff, Alois Herkommer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations

Actinic review of EUV masks

Heiko Feldmann, Johannes Ruoff, Wolfgang Harnisch et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations

First results for hyper NA scanner emulation from AIMS 45-193i

Axel M. Zibold, Norbert Rosenkranz, Andrew Ridley et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

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