Concepedia
Statistics
Publications
2
Citations
45
H-Index
Active since
2010
Affiliations
Carl Zeiss (Germany)(Current)
Heiko Feldmann is an author at Carl Zeiss (Germany).
Publications per year
2010–2011
AIMS EUV: the actinic aerial image review platform for EUV masks
Dirk Hellweg, Johannes Ruoff, Alois Herkommer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations
Actinic review of EUV masks
Heiko Feldmann, Johannes Ruoff, Wolfgang Harnisch et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations
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