Concepedia

Norbert Rosenkranz

NR

Statistics

Publications

3

Citations

38

H-Index

3

Active since

2006

Affiliations

Carl Zeiss (Germany)(Current)

Norbert Rosenkranz is an author at Carl Zeiss (Germany) specializing in ophthalmology, instrumentation, and engineering.

Top concepts

Publications per year

2006–2008

3

Publications

3

First results for hyper NA scanner emulation from AIMS 45-193i

Axel M. Zibold, Norbert Rosenkranz, Andrew Ridley et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

, , +20

Photomask registration and overlay metrology by means of 193 nm optics

Gerd Klose, Norbert Kerwien, Michael Arnz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

, , +26

PROVE: a photomask registration and overlay metrology system for the 45 nm node and beyond

Gerd Klose, Dirk Beyer, M. Arnz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

, , +25

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