Mikihiko Ishii

Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL

Katsura Otaki, Yucong Zhu, Mikihiko Ishii et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 20 citations

Engineering, Optic Design, Nm Rms +19

Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography

Yucong Zhu, Katsumi Sugisaki, Masashi Okada et al. · Applied Optics · 2007 · 17 citations

Engineering, Optical Testing, Interferometry +17

Shearing Interferometry for at Wavelength Wavefront Measurement of Extreme-Ultraviolet Lithography Projection Optics

Yucong Zhu, Katsumi Sugisaki, Katsuhiko Murakami et al. · Japanese Journal of Applied Physics · 2003 · 13 citations

Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes

Katsuhiko Murakami, Jun Saito, Kazuya Ota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations

Engineering, Measurement, Optical Testing +19