James A. Bondur

Dry process technology (reactive ion etching)

James A. Bondur · Journal of Vacuum Science and Technology · 1976 · 97 citations

Natural Sciences, Materials Engineering, Materials Science +15

<title>Etch process characterization using neural network methodology: a case study</title>

Michael T. Mocella, James A. Bondur, Terry R. Turner · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 39 citations

Engineering, Electrical Engineering, Materials Engineering +17

CF 4 Etching in a Diode System

James A. Bondur · Journal of The Electrochemical Society · 1979 · 23 citations

Engineering, Electrical Engineering, Materials Science +12

Reactive Ion Etching of Silicon with Cl2 / Ar ( 1 )

H.B. Pogge, James A. Bondur, P. J. Burkhardt · Journal of The Electrochemical Society · 1983 · 20 citations

Engineering, Materials Engineering, Materials Science +17

Advanced Techniques for Integrated Circuit Processing II

James A. Bondur, Gary Castleman, L. R. Harriott et al. · 1991 · 12 citations

Engineering, Computer Engineering, Electrical Engineering +14