Terry R. Turner

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

P. J. Hargis, K. E. Greenberg, Paul Miller et al. · Review of Scientific Instruments · 1994 · 332 citations · Full text

Natural Sciences, Electrical Engineering, Microelectronics +14

<title>Etch process characterization using neural network methodology: a case study</title>

Michael T. Mocella, James A. Bondur, Terry R. Turner · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 39 citations

Engineering, Electrical Engineering, Materials Engineering +17

Process Module Metrology, Control and Clustering

Cecil J. Davis, Irving P. Herman, Terry R. Turner · 1992 · 14 citations

Engineering, Industrial Engineering, Systems Engineering +12

Advanced Techniques for Integrated Circuit Processing II

James A. Bondur, Gary Castleman, L. R. Harriott et al. · 1991 · 12 citations

Engineering, Computer Engineering, Electrical Engineering +14