Statistics
Publications
6
Citations
146
H-Index
6
Active since
1990
Affiliations
Shinichi Mizuguchi is an author at Panasonic (Japan) specializing in engineering, digital holography, and optical properties.
Publications per year
1990–2002
6
6
Toshiya Masuda, Shinichi Mizuguchi, Tomochika Tanaka et al. · Journal of Agricultural and Food Chemistry · 2000 · 33 citations
Performance of 0.2 μm optical lithography using KrF and ArF excimer laser sources
Kazuhiro Yamashita, Masayuki Endo, Masaru Sasago et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 11 citations
Optical Materials, Engineering, Electron-beam Lithography +23
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