Statistics
Publications
4
Citations
169
H-Index
4
Active since
1988
Affiliations
Paul Feeney is an author at Cabot Microelectronics (United States) specializing in materials engineering, engineering, and semiconductor devices.
Publications per year
1988–2010
4
4
CMP Solutions for the Integration of High-K Metal Gate Technologies
Jeffrey M. Dysard, V. Brusić, Paul Feeney et al. · ECS Transactions · 2010 · 13 citations
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