4
Publications
70
Citations
4
H-Index
2003
Active since
Yorick Trouiller is an author at STMicroelectronics (France) specializing in computer engineering, engineering, and computer-aided design.
Top concepts
EngineeringComputer EngineeringApplied PhysicsInstrumentationMicroelectronicsComputer ArchitectureComputer-aided DesignElectrical EngineeringCalibrationVlsi Design
Publications per year
2003–2005
4
4
Improving model-based OPC performance for the 65-nm node through calibration set optimization
Kyle Patterson, Yorick Trouiller, Kevin Lucas et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 29 citations
Sensor Calibration, Resist Model, Electrical Engineering +13
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