Jérôme Belledent

Statistics

Publications

Citations

188

H-Index

Active since

2004

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

STMicroelectronics (France)

Philips (France)

Centre National de la Recherche Scientifique

Jérôme Belledent is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in engineering, materials science, and semiconductor devices.

Publications per year

2004–2014

Publications

The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication

Raluca Tiron, A. Gharbi, Maxime Argoud et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 50 citations

Engineering, Materials Engineering, Materials Science +17

A Cost-Effective Low Power Platform for the 45-nm Technology Node

E. Josse, S. Parihar, Olivier Callen et al. · 2006 · 33 citations

Engineering, Computer Engineering, Electrical Engineering +11

Improving model-based OPC performance for the 65-nm node through calibration set optimization

Kyle Patterson, Yorick Trouiller, Kevin Lucas et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 29 citations

Engineering, Electrical Engineering, Materials Science +10

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Isabelle Servin, Raluca Tiron, Ahmed Gharbi et al. · Japanese Journal of Applied Physics · 2014 · 23 citations

Engineering, Materials Engineering, Materials Science +17

Contact holes patterning by directed self-assembly of block copolymers: What would be the Bossung plot?

A. Gharbi, Raluca Tiron, Maxime Argoud et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

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