Concepedia

John Hoang

JH

Statistics

Publications

14

Citations

319

H-Index

12

Active since

2006

Affiliations

University of California, Los Angeles(Current)

Lam Research (United States)

Stanford Synchrotron Radiation Lightsource

University of Groningen

University Medical Center Groningen

John Hoang is an author at University of California, Los Angeles specializing in materials science, natural sciences, and materials engineering.

Publications per year

2006–2023

14

Publications

14

Dry etching in the presence of physisorption of neutrals at lower temperatures

Thorsten Lill, Ivan L. Berry, Meihua Shen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2023 · 44 citations

Natural Sciences, Chemistry, Materials Science +17

Progress report on high aspect ratio patterning for memory devices

Meihua Shen, Thorsten Lill, John Hoang et al. · Japanese Journal of Applied Physics · 2023 · 42 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits

Trinh Tu Van, John Hoang, Roman Ostroumov et al. · Journal of Applied Physics · 2006 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +17

Feature profile evolution during shallow trench isolation etch in chlorine-based plasmas. I. Feature scale modeling

John Hoang, Cheng‐Che Hsu, Jane P. Chang · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 29 citations

Natural Sciences, Materials Science, Physics +13

Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition

John Hoang, T. T. Van, Monica Sawkar-Mathur et al. · Journal of Applied Physics · 2007 · 27 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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