Statistics
Publications
11
Citations
230
H-Index
10
Active since
1988
Affiliations
Shinichiro Kawakami is an author at Tokyo Electron (Japan) specializing in engineering, materials science, and semiconductor devices.
Publications per year
1988–2022
11
11
Clinical and Immunological Study of IgA Nephropathy before and after Tonsillectomy
Yu Masuda, Kazutaka Terazawa, Shinichiro Kawakami et al. · Acta Oto-Laryngologica · 1988 · 58 citations
Medicine, Immunology, Pathology +12
Evaluation of Facial Palsy by Moiré Topography Index
Koji Yuen, Ikuo Inokuchi, Michio Maeta et al. · Otolaryngology · 1997 · 36 citations
Line width roughness control and pattern collapse solutions for EUV patterning
Karen Petrillo, George Huang, Dominic Ashworth et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 19 citations
Natural Sciences, Materials Engineering, Materials Science +17
Physical verification and manufacturing of contact/via layers using grapho-epitaxy DSA processes
J. Andres Torres, Kyohei Sakajiri, David S. Fryer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 18 citations
Engineering, Manufacturing Engineering, Materials Science +9
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