R. Fullowan

Spatial light modulator for maskless optical projection lithography

G. P. Watson, Vladimir Aksyuk, M.E. Simon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 24 citations

Spatial Light Modulators, Photonics, Optical Materials +15

Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

F. Pardo, R. Cirelli, E. Ferry et al. · Microelectronic Engineering · 2007 · 18 citations

Adaptive Optic, Photonics, Engineering +7

Evaluation of a 100 kV thermal field emission electron-beam nanolithography system

D. M. Tennant, R. Fullowan, Hitoshi Takemura et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 16 citations

Electrical Engineering, Performance Evaluation Tests, Engineering +13

Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays

F. Pardo, M.E. Simon, Vladimir Aksyuk et al. · 2006 · 12 citations

Engineering, Optic Design, Mechanical Engineering +19