Concepedia

Hitoshi Takemura

HT

Statistics

Publications

6

Citations

76

H-Index

6

Active since

1986

Affiliations

JEOL (Japan)(Current)

Hiroshima Institute of Technology

JEOL (United States)

Yamaguchi University

Hitoshi Takemura is an author at JEOL (Japan) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringOptoelectronicsMicroelectronicsPhysicsInstrumentationMicrofabricationElectronic PackagingPhotonics

Publications per year

1986–2003

6

Publications

6

Evaluation of a 100 kV thermal field emission electron-beam nanolithography system

D. M. Tennant, R. Fullowan, Hitoshi Takemura et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 16 citations

Electrical Engineering, Performance Evaluation Tests, Engineering +13

Light-induced defect creation under pulsed subbandgap illumination in hydrogenated amorphous silicon

Kazuo Morigaki, Harumi Hikita, Hitoshi Takemura et al. · Philosophical Magazine Letters · 2003 · 14 citations

Engineering, Silicon On Insulator, Optical Properties +18

A thermally assisted field emission electron beam exposure system

H. Nakazawa, Hitoshi Takemura, M. Isobe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 13 citations

Engineering, Electron-beam Lithography, Current Density +17

Development of nanometric electron-beam lithography system (JBX-5D II)

Michael H. Shearer, Hitoshi Takemura, M. Isobe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 12 citations

Engineering, Electron-beam Lithography, Microscopy +18

Performance of new E-beam lithography system JBX-9300FS

Hitoshi Takemura, H. Ohki, H. Nakazawa et al. · Microelectronic Engineering · 2000 · 11 citations

Electrical Engineering, Engineering, Beam Lithography +6

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