Andy Ma

Statistics

Publications

Citations

271

H-Index

Active since

2001

Affiliations

Lawrence Berkeley National Laboratory(Current)

Intel (United States)

University of Surrey

Advanced Micro Devices (United States)

Samsung (South Korea)

Andy Ma is an author at Lawrence Berkeley National Laboratory specializing in materials science, extreme ultraviolet lithography, and natural sciences.

ORCID

Publications per year

2001–2023

Publications

Monte Carlo study of photoneutron production in the Varian Clinac 2100C linac

Andy Ma, J. Awotwi-Pratt, Ali Alghamdi et al. · Journal of Radioanalytical and Nuclear Chemistry · 2007 · 61 citations

Natural Sciences, Nuclear Engineering, Physics +16

22-nm Half-pitch extreme ultraviolet node development at the SEMATECH Berkeley microfield exposure tool

Patrick Naulleau, Christopher N. Anderson, Jerrin Chiu et al. · Microelectronic Engineering · 2009 · 31 citations

Natural Sciences, Electrical Engineering, Materials Science +7

<title>TaN EUVL mask fabrication and characterization</title>

Pei-yang Yan, Guojing Zhang, Andy Ma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +16

Effects of Robotics Education on Young Children’s Cognitive Development: a Pilot Study with Eye-Tracking

Yan Liu, Darko Odic, Xuyan Tang et al. · Journal of Science Education and Technology · 2023 · 25 citations · Full text

Education, Early Childhood Education, Educational Technology +17

Film quantum yields of EUV and ultra-high PAG photoresists

Elsayed Hassanein, Craig Higgins, Patrick Naulleau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 22 citations

Natural Sciences, Chemistry, Materials Science +13

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