Vincent Henneken

Statically Balanced Compliant Micro Mechanisms (SB-MEMS): Concepts and Simulation

N. Tolou, Vincent Henneken, Just L. Herder · 2010 · 48 citations

Engineering, Soft Robotics, Micromachines +15

Flex-to-Rigid (F2R): A Generic Platform for the Fabrication and Assembly of Flexible Sensors for Minimally Invasive Instruments

Benjamin Mimoun, Vincent Henneken, Arjen van der Horst et al. · IEEE Sensors Journal · 2013 · 36 citations

Medical Electronics, Engineering, Mechanical Engineering +27

Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Benjamin Mimoun, Hoa T. M. Pham, Vincent Henneken et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 26 citations

Engineering, Mechanical Engineering, Plasma Processing +18

In-package MEMS-based thermal actuators for micro-assembly

Vincent Henneken, Marcel Tichem, P.M. Sarro · Journal of Micromechanics and Microengineering · 2006 · 25 citations

Engineering, Soft Robotics, Lateral Xy Positioning +14

An improved in-plane thermal folded V-beam actuator for optical fibre alignment

Wouter P. Sassen, Vincent Henneken, Marcel Tichem et al. · Journal of Micromechanics and Microengineering · 2008 · 21 citations

Engineering, Optical Fibre Alignment, Mechanical Engineering +9