Statistics
Publications
4
Citations
103
H-Index
4
Active since
2007
Affiliations
Delft University of Technology(Current)
Hoa T. M. Pham is an author at Delft University of Technology specializing in natural sciences, surface science, and materials science.
Publications per year
2007–2021
4
4
Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage
Benjamin Mimoun, Hoa T. M. Pham, Vincent Henneken et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 26 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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