4
Publications
96
Citations
4
H-Index
2012
Active since
Benjamin Mimoun is an author at Delft University of Technology specializing in microfabrication, engineering, and instrumentation.
Top concepts
EngineeringMicrofabricationSensorsInstrumentationFlexible SensorsSensor TechnologyFlexible ElectronicsBiomedical EngineeringMechanical EngineeringMedical Instrumentation
Publications per year
2012–2013
4
4
Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage
Benjamin Mimoun, Hoa T. M. Pham, Vincent Henneken et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 26 citations
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1–4 of 4